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    • 专利摘要:
    A modular photoacoustic detection device (100) comprising at least: - a photoacoustic cell (106) comprising at least two chambers (110, 112) connected by at least two capillaries (114, 116) and forming a Helmholtz type differential acoustic resonator; acoustic detectors (122, 124) coupled to the chambers; a light source (102) capable of emitting a light beam having at least one wavelength capable of exciting a gas intended to be detected and adjustable at a resonant frequency of the photoacoustic cell; a first photonic circuit (104) optically coupling the light source to an input face (109) of a first one of the chambers (110); wherein the first photonic circuit is removably disposed in a first housing (108) formed in the acoustic cell and opening into the input face of the first chamber.
    公开号:FR3037145A1
    申请号:FR1555200
    申请日:2015-06-08
    公开日:2016-12-09
    发明作者:Justin Rouxel；Mickael Brun；Alain Gliere；Sergio Nicoletti
    申请人:Commissariat a lEnergie Atomique CEA；Commissariat a lEnergie Atomique et aux Energies Alternatives CEA；
    IPC主号:
    专利说明:

    [0001] TECHNICAL FIELD AND PRIOR ART The invention relates to the field of miniaturized photoacoustic detection devices, and in particular that of miniaturized gas sensors using a photoacoustic effect to measure the concentration of certain gaseous elements. The principle of a measurement of a gas by photoacoustic effect is based on the excitation of an acoustic wave in the gas by a light source such as a pulse laser or modulated amplitude or wavelength. The wavelength of the radiation, for example in the mid-infrared (MIR), the near infrared (NIR), or the visible or UV range, emitted by the laser is chosen to interact specifically with the molecules of the gas to be detected. The emission of the light source being modulated, the energy absorbed by the gas molecules is restored in the form of a transient heating that generates a pressure wave, itself measured by an acoustic sensor such as a microphone. Although the photoacoustic effect has been known for a long time, its use for gas measurement has been made possible by the use of monochromatic light sources such as lasers, and sensitive microphones such as capacitive electret microphones. Detection is improved by confining the gas in a cavity and modulating the laser at an acoustic resonance frequency of the cavity. The amplitude of the acoustic wave obtained is directly related to the concentration of the desired gaseous compound in the gas present in the excited cavity.
    [0002] The effectiveness of the detection relies in large part on the efficient coupling of the light flux from the laser with the gas contained in the resonant cavity because the measured signal is proportional to the energy absorbed and then dissipated by the gas. WO 03/083455 A1 discloses a photoacoustic measuring device for detecting the presence of a gas and having a particular photoacoustic cell structure called "Differential Helmholtz Resonator" (DHR), or differential acoustic resonator Helmholtz type. Such a photoacoustic cell comprises two identical chambers interconnected by two capillaries. Acoustic resonance is produced by exciting only one of the two chambers. At resonance, the pressures in the two chambers oscillate in phase opposition. The pressures in the chambers are measured by microphones placed on the walls of the two chambers. With such a resonator, the calculation of the difference between the signals from each chamber, which corresponds to the useful signal, makes it possible to increase the amplitude of the measured signal and to eliminate a part of the surrounding noise, and therefore to have in the end a good signal-to-noise ratio. However, such a device has the drawbacks of being limited to a non-miniaturized laboratory apparatus, of having limited transmission wavelengths, of being sensitive to temperature variations and vibrations, and of having strong constraints. positioning and alignment of its elements for its realization.
    [0003] EP 2 515 096 A1 discloses a photoacoustic gas detection device comprising a miniaturized photoacoustic resonator integrated on DHR-type silicon. The structure of this detector is obtained by the implementation of techniques of the field of microelectronics in several substrates bonded together. The manufacturing process requires placing the MIR waveguide, which allows the laser optical signal to be injected into one of the two chambers, into the lower part of the central substrate which is thinned to a thickness determined by the height of the bedrooms. The entire device is made in the form of a single nano-photonic circuit integrating all the elements of the device. Thus, this device is miniaturized, which has many advantages. Indeed, this miniaturization makes it possible to have a stronger pressure signal produced by the sensor because this signal increases when the size of the resonator is reduced. DHR resonators are particularly well suited to miniaturization and integration on silicon because they are relatively insensitive to the location of the thermal energy deposit and because, the pressure being almost constant in each chamber, it is possible to multiply the number of microphones per chamber to improve the signal-to-noise ratio. On the other hand, the monolithic structure of this device poses several disadvantages.
    [0004] Indeed, after one or more gas detections, the chambers of the photoacoustic cell may be contaminated by the gas or gases detected. It is also possible that the microphones no longer work after several gas detections. However, with such a monolithic structure, it is then necessary to replace the entire detection device to make new gas detections.
    [0005] In addition, to be able to detect different gases, the device necessarily uses several different laser sources, which represents a significant cost for the realization of the detection device. This is even more problematic when the contamination of the chambers of the photoacoustic cell requires the replacement of these different laser sources.
    [0006] SUMMARY OF THE INVENTION An object of the present invention is to propose a photoacoustic detection device that does not pose the problems associated with the monolithic detection devices of the prior art, that is to say not requiring a replacement of the entire detection device when the chambers of the photoacoustic cell 20 are contaminated by the gas, and which can be used for the detection of different gases without necessarily having to integrate different light sources to the device. For this, the present invention proposes a modular photoacoustic detection device comprising at least: a photoacoustic cell comprising at least two chambers connected by at least two capillaries and forming a Helmholtz-type differential acoustic resonator; acoustic detectors coupled to the chambers; A light source capable of emitting a light beam having at least one wavelength capable of exciting a gas intended to be detected and adjustable at a resonant frequency of the photoacoustic cell; a first photonic circuit optically coupling the light source to an input face of a first of the chambers; wherein the first photonic circuit is removably disposed in a first housing formed in the acoustic cell and opening onto the entrance face of the first chamber. Due to the removable nature of the first photonic circuit, this photoacoustic detection device 10 is modular. Thus, the light source, the first photonic circuit and the photoacoustic cell form elements that can be dismounted from each other and are therefore replaceable independently of each other when one of these elements is faulty. For example, if the chambers of the photoacoustic cell are contaminated as a result of a gas detection, only the photoacoustic cell can be replaced and the new photoacoustic cell can be coupled to the other elements of the device that are conserved (photonic circuit, light source, etc.). If the light source becomes faulty, it can be replaced without having to replace the photoacoustic cell and the first photonic circuit. Also, when the acoustic detectors are no longer operating, it is possible to replace them without having to change the light source and the first photonic circuit. The modular nature of the detection device is also advantageous because it is possible to easily change the light source to detect different gases using the same photoacoustic cell. This avoids having to integrate several different sources to the detection device.
    [0007] These advantages make it possible to reduce the operating costs of the photoacoustic detection device. It is thus possible to mass produce these devices that can be used for monitoring gases of atmospheric interest, for example in the prediction of gas leaks in a short time in the industry or for the detection of toxic gas for example in aircraft .
    [0008] The photoacoustic detection device can be described as "miniaturized", that is to say have lateral dimensions of less than about 10 cm. The acoustic detectors can be removably coupled to the photoacoustic cell. Thus, the acoustic detectors can be replaced or stored independently of the photoacoustic cell, thus increasing the modularity of the device. The photoacoustic cell can be formed by a stack of several layers of materials. The elements of the cell can be etched in the layers of materials.
    [0009] According to a first exemplary embodiment, the photoacoustic cell may comprise at least one stack of first and second layers of material in which the chambers, the capillaries, the first housing may be formed, at least two openings that can open each in one of the capillaries and at least two locations each of which can communicate with one of the chambers and in which the acoustic detectors can be arranged. Such a configuration is particularly suitable when the elements of the photoacoustic cell are made by chemical etching in part of the thickness of the layers of material. In the case of this first exemplary embodiment: the locations may be formed in part of the thickness of the first layer and may pass through an upper face of the first layer; the openings can pass through the entire thickness of the first layer; a first portion of each of the chambers may be formed in a portion of the thickness of the first layer and may pass through a lower face of the first layer opposite to the upper face of the first layer; the capillaries can be formed in a part of the thickness of the first layer and can pass through the lower face of the first layer; a second part of each of the chambers may be formed in a part of the thickness of the second layer and may pass through an upper face of the second layer which is arranged against the lower face of the first layer, the first and second layers; parts of each of the chambers that can be arranged facing each other; the first housing can be formed in part of the thickness of the second layer and can pass through the upper face of the second layer.
    [0010] According to a second exemplary embodiment, the photoacoustic cell may comprise at least one stack of a first, second, third and fourth layer of material in which the chambers, the capillaries, the first housing, at least two openings may be formed. each of which opens into one of the capillaries and at least two locations each of which can communicate with one of the chambers and in which the acoustic detectors can be arranged. The fact that the different elements of the photoacoustic cell are made throughout the thickness of at least one of the layers of the stack allows to obtain patterns having edges well perpendicular to each other. In the case of this second embodiment: the capillaries can pass through the entire thickness of the second layer, the first and third layers between which is the second layer being able to form upper and lower walls of the two capillaries; - the chambers and the first housing can cross the entire thickness of the third layer, the second and fourth layers between which is the third layer can form upper and lower walls of the chambers and the first housing; the locations can cross the entire thickness of the fourth layer; the openings can pass through the entire thickness of the third and fourth layers. According to a third exemplary embodiment, the photoacoustic cell may be formed of a monolithic piece of fused powders. Such a cell can be made by 3D printing. According to a first example of coupling between the light source and the first photonic circuit, the light source can be optically coupled to an input face of the first photonic circuit by at least one collimation system that can comprise at least one lens, and the first photonic circuit can form at least one waveguide. This first example of coupling is adapted in particular when the light source emits a light beam having a single wavelength.
    [0011] According to a second example of coupling between the light source and the first photonic circuit, the light source may be able to emit a light beam having several wavelengths and may be arranged against the first photonic circuit which forms a multiplexer-demultiplexer circuit. with waveguide network. According to a third example of coupling between the light source and the first photonic circuit, the light source can be optically coupled to an input face of the first photonic circuit by at least one optical fiber, and the first photonic circuit can form at least one optical fiber. a waveguide or a waveguide grating demultiplexer circuit. The device may furthermore comprise at least one first cooling system capable of thermally regulating the light source and, when the light source is not arranged against the first photonic circuit, a second cooling system able to thermally regulate the photoacoustic cell. regardless of the light source. The use of two separate cooling systems makes it possible to independently manage the operating temperatures of the light source (for example between about 19 ° C. and 26 ° C.) and the photoacoustic cell (for example, between about 15 ° C.). ° C and 20 ° C). The photoacoustic cell may further comprise at least one second housing opening on an exit face of the first chamber, and the device may further comprise at least one second photonic circuit that can optically couple the exit face of the first chamber to a second one. optical detector and removably disposed in the second housing. In this configuration, the second photonic circuit thus also forms a part that can be assembled and / or changed independently of the other elements of the detection device.
    [0012] The photoacoustic cell may be formed of one or more metals. The use of one or more metals to form the photoacoustic cell allows the walls of the chambers to reflect the light beam, without adding additional reflection means around the chambers.
    [0013] A distance between the two capillaries may be about half the length of at least one of the chambers. This configuration makes it possible to have a better homogeneity of the pressure in the chambers of the photoacoustic cell. The invention also relates to a gas detection device, comprising at least one device as described above and gas inlet and outlet channels communicating with the chambers of the photoacoustic detection device, and wherein said at least one wavelength of the light beam capable of being emitted by the light source corresponds to at least one absorption wavelength of at least one gas intended to be detected.
    [0014] The invention also relates to a method for producing a modular photoacoustic detection device, comprising at least the steps of: - producing at least one photoacoustic cell comprising at least two chambers connected by at least two capillaries and forming a Helmholtz type differential sound resonator; Coupling of acoustic detectors to the chambers; - Realization of at least one light source capable of emitting a light beam having at least one wavelength capable of resonating the photoacoustic cell; - Making at least a first photonic circuit removably disposed in a first housing formed in the acoustic cell and opening on an inlet face of a first chamber, and optically coupling the light source to the face of entrance to the first bedroom. According to various exemplary embodiments: the production of the photoacoustic cell may comprise the production of at least one stack of first and second layers of material in which are formed by chemical etching implemented in a part of the thickness of each of the first and second layers, the chambers, the capillaries, the first housing, at least two openings each opening into one of the capillaries and at least two locations each communicating with one of the 5 chambers and in which the acoustic detectors are arranged, or - the realization of the photoacoustic cell may comprise the production of at least one stack of a first, second, third and fourth layer of material in which are formed, by chemical etching or laser implemented throughout the thickness of each of the second, third and fourth layers, the chambers, the capillaries, the first housing, at least two openings each opening into one of the capillaries and at least two locations (132, 134) each communicating with one of the chambers and in which the acoustic detectors are arranged, or - the photoacoustic cell can be formed of a monolithic piece of fused metal powders obtained by 3D printing. BRIEF DESCRIPTION OF THE DRAWINGS The present invention will be better understood on reading the description of exemplary embodiments given purely by way of indication and in no way limiting, with reference to the appended drawings in which: FIG. 1 schematically represents a photoacoustic detection device modular, object of the present invention, according to a particular embodiment; FIGS. 2A to 5 show the steps for producing the photoacoustic cell of a modular photoacoustic detection device, object of the present invention, according to a first embodiment; FIG. 6 represents the resonance frequency and the pressure homogeneity in the photoacoustic cell of a modular photoacoustic detection device, object of the present invention, as a function of the spacing between the capillaries of the photoacoustic cell; FIG. 7 represents the amplitude of the acoustic signal in the photoacoustic cell of a modular photoacoustic detection device, object of the present invention, as a function of the width of the capillaries of the photoacoustic cell; FIGS. 8A to 8C show different coupling configurations between the light source and the first photonic circuit of the modular photoacoustic detection device, object of the present invention; FIGS. 9 to 12 each represent a layer of material of a stack forming the photoacoustic cell of a modular photoacoustic detection device 10 which is the subject of the present invention, according to a second exemplary embodiment; FIG. 13 represents a photoacoustic cell of a modular photoacoustic detection device, object of the present invention, according to a third exemplary embodiment.
    [0015] Identical, similar or equivalent parts of the various figures described below bear the same numerical references so as to facilitate the passage from one figure to another. The different parts shown in the figures are not necessarily in a uniform scale, to make the figures more readable.
    [0016] The different possibilities (variants and embodiments) must be understood as not being exclusive of each other and can be combined with one another. DETAILED DESCRIPTION OF PARTICULAR EMBODIMENTS Referring first to FIG. 1, which schematically shows a modular photoacoustic detection device 100 according to a particular embodiment. This device 100 corresponds here to a gas detection device. The device 100 comprises a light source 102 corresponding here to a laser. This laser can correspond to a QCL type laser ("Quantum cascade laser" or ICL ("Interband cascade laser" or cascade laser 3037145 11) emitting at least one wavelength in the MIR domain, for example at a wavelength of between about 2 μm and 10 μm. Although not shown, the device 100 also comprises a power supply of the light source 102 as well as means for modulating the light beam emitted at an acoustic resonance frequency of the cavity in which the light beam is intended to be sent. With respect to the use of a light source that is not collimated, the use of a light source 102 collimated in the device 100, by reducing the window noise, makes it possible to greatly increase the signal / signal factor. noise, for example by a factor 2. The window noise corresponds to the spurious acoustic signal 10 that all the solid parts emit when struck by the modulated light wave. Alternatively, the light source 102 may comprise several lasers, and corresponds for example to a laser bar QCL or ICL, emitting a light beam formed of several different wavelengths.
    [0017] The emitted light beam is then transmitted in a first photonic circuit 104 which makes it possible to transmit the light beam in a photoacoustic cell 106 of the device 100. The first photonic circuit 104 comprises an input face 105 optically coupled to the light source 102. The optical coupling between the light source 102 and the first photonic circuit 104 can be performed directly, for example by placing the light source 102 against the first photonic circuit 104, or via the use of other means which will be described later. The first photonic circuit 104 also has an output face 107. The first photonic circuit 104 is inserted into a first housing 108 formed in the cell 106. In Fig. 1, a portion of the first photonic circuit 104 having the output face 107 is inserted in this first housing 108, and another part of the first photonic circuit 104 is outside the first housing 108. The photoacoustic cell 106 of the device 100 comprises elements corresponding to cavities, or recesses, which are: - a first chamber 110 in which the gas to be detected is intended to be excited by the light beam emitted by the source 102, and whose input face 3037145 12 109 for receiving the light beam is optically coupled to the output face 107 of the circuit photonic 104 (because the faces 107 and 109 are parallel to each other and are arranged against each other when the first circui photonic 104 is inserted into the first housing 108); 5 - a second chamber 112; two capillaries 114 and 116 making it possible to communicate the volumes of the chambers 110 and 112 between them. The light source 102 is aligned with the first photonic circuit 104 to inject the light into the first chamber 110, without a procedure 10 for aligning the light source 102 with the first chamber 110 is necessary since the insertion of the first photonic circuit 104 into the first housing 108 automatically performs this alignment. The capillaries 114, 116 are advantageously connected to the chambers 110, 112 at their lateral faces (faces parallel to the (X, Z) plane shown in FIG. 1). Thus, the capillaries 114, 116 and the chambers 110, 112 can be formed in the same layer, or plate, of material, which allows their realization with a reduced number of manufacturing steps. Alternatively, the capillaries 114, 116 may be connected to the chambers 110, 112 at their upper or lower face (faces parallel to the plane (X, Y) shown in Figure 1), the ends of the capillaries 114, 116 being arranged on or under the chambers 110, 112. In this case, the capillaries 114, 116 and the chambers 110, 112 are made in two separate layers of material. The height of the capillaries 114, 116 (dimension parallel to the axis Z shown in FIG. 1) is here less than or equal to about half the height of the chambers 110, 112. This configuration makes it possible to have a resonant frequency of the cell which is low, for example between a few hundred Hz and a few kHz. In addition, this configuration can be obtained when the cell 106 is formed by stacking two layers of material by making the capillaries 114, 116 in part of the thickness of one of these two layers (for example half of the thickness of the layer) and making the chambers 110, 112 in part of the thickness of each of these two layers (for example half the thickness of each of the 13 layers). However, it is also possible to alternatively have capillaries 114, 116 of height substantially equal to that of the chambers 110, 112. In this case, the two layers of the cell 106 can be similarly etched with one half of the capillaries 114, 116 and 110, 112 chambers made in each of these two layers.
    [0018] The cell 106 also has a first opening 118 opening into the capillary 114 and making it possible to bring the gas into the chambers 110 and 112 via this capillary 114 and an inlet channel connected to this first opening 118. The cavity 106 also comprises a second opening 120 opening into the capillary 116 and making it possible to evacuate the gas from the chambers 110 and 112 via this capillary 116 and an outlet channel connected to this second opening 120. In FIG. 1, the openings 118, 120 are realized substantially at the mid-point of the length (dimension parallel to the Y axis shown in FIG. 1) of these capillaries 114, 116. As a variant, the second opening 120 can be used to bring the gas into the chambers 110 and 112 via the capillary 116, and the first opening 118 can be used to evacuate the gas out of the chambers 110 and 112 via the capillary 114. The cell 106 can be made from different m such as semiconductors, for example silicon, glass, plastic, ceramic or even metal such as aluminum, stainless steel, bronze, etc. Stainless steel is particularly advantageous because this metal is inert with respect to the gases that can be sent into the cell 106. The realization of a metal cell 106 is advantageous because the walls of the chambers 110, 112 can in this case reflect the light, which allows this reflected light to interact again with the gas present in the cell 106, and thus improve the amplitude of the photoacoustic signal. The device 100 also comprises acoustic detectors 122, 124, such as piezoresistive miniaturized microphones, for example of the resonant beam type, or capacitive microphones of the vibrating membrane type, are also coupled to the chambers 110, 112 in order to carry out the pressure measurements. in the chambers 110, 112. Each of the chambers 110, 112 may be coupled to one or more microphones, for example up to eight microphones per chamber. The acoustic detectors 122, 124 are arranged in locations 132, 134 (not visible in FIG. 1) formed in the photoacoustic cell 106 and allowing acoustic coupling of the detectors 122, 124 with the chambers 110, 112 of the cell. 106 as well as the mechanical maintenance of these detectors 122, 124 on the cell 106. Finally, the device 100 also comprises electronic circuits for processing the signals delivered by the acoustic detectors 122, 124, these circuits not being represented on the detector. FIG. 1. The device 100 described here is modular and comprises a photoacoustic cell 106 provided with the first housing 108 and locations 132, 134 for detachably, that is to say, non-definitive coupling, the first photonic circuit 10 104 and the acoustic detectors 122, 124 with the chambers 110, 112 of the cell 106. The openings 118, 120 also make it possible to removably couple the cel lule 106 with the gas inlet and outlet channels separate from the cell 106. Alternatively, only the first photonic circuit 104 can be removably coupled to the cell 106. The operating principle of the device 100 is similar to that described in EP 2 515 096 A1 and is therefore not described in detail here. The cell 106 is here fixed on a frame, for example made of metal such as aluminum or brass, which is mechanically and thermally decoupled from the light source 102, which makes it possible to thermally manage the cell 106 independently of the source. 102. The light source 102 can therefore operate at a precise temperature that may be different from that of the gas to be studied in the cell 106. A first Peltier cooling system (also called Peltier controller or Peltier module), or a water cooling system may be associated with the light source 102 to regulate the operating temperature of the light source 102, while a second cooling system, for example a second Peltier module or a second water cooling circuit, can regulate the temperature of the cell 106 where the gas to be analyzed is present. The device 100 is heterogeneous because the cell 106 and the light source 102 do not have the same thermal conductivity. This configuration makes it possible to have good thermal management of the device 100. With reference to FIGS. 2A to 5, the steps for producing the photoacoustic cell 106 according to a first exemplary embodiment are described next.
    [0019] In this first exemplary embodiment, the cell 106 is formed by the assembly of two metal layers 126, 128 in which are etched, for example by chemical etching, the elements of the cell 106. The metal layers 126, 128 have here each a thickness equal to about 1.5 mm and are for example stainless steel.
    [0020] Figure 2A shows a top view of the first layer 126 on which an upper face 130 of the first layer 126 is visible. Figure 2B shows a perspective view of the first layer 126 on which the upper face 130 is visible. The openings 118, 120 are etched through the top face 130 in a portion of the thickness of the first layer 126, here equal to about half the thickness of the first layer 126, i.e. equal to about 0.75 mm. The diameters of the openings 118, 120 are equal to one another and are equal to the width (dimension parallel to the X axis) of the capillaries 114, 116. The locations 132, 134 intended to receive the acoustic detectors 122, 124 are also etched through the upper face 130 in a portion of the thickness of the first layer 126, corresponding here also to about half the thickness of the first layer 126. These locations 132, 134 form grooves in which the acoustic detectors 122, 124 will be located in abutment at the bottom of these grooves. Fixing holes for clamping the layers 126, 128 between them and for sealing the cell 106 are also etched through the entire thickness of the first layer 126. Nine fixing holes, not visible in the figures 2A and 2B, are for example made, five of these holes being intended for clamping the layers 126, 128 against one another and four other holes being intended for holding, above the cell 106, a device for supply of gas to the cell 106.
    [0021] Figure 3A shows a bottom view of the first layer 126 on which a bottom face 136 of the first layer 126 is visible. Figure 3B shows a perspective view of the first layer 126 on which the lower face 136 is visible.
    [0022] A first portion of the chambers 110, 112 and the capillaries 114, 116 are etched in the form of trenches through the lower face 136 in a portion of the thickness of the first layer 126, here equal to about half of the thickness of the first layer 126, that is to say equal to about 0.75 mm. The fixing holes (not visible in FIGS. 3A and 3B) made through the first layer 126 are therefore also present at the lower face 136. FIG. 4A represents a view from above of the second layer 128 on which a upper face 138 of the second layer 128, intended to be disposed against the lower face 136 of the first layer 126, is visible. Figure 4B is a perspective view of the second layer 128 on which the upper face 138 is visible. Trenches for forming a second portion of the chambers 110, 112 are etched through the upper face 138 in a portion of the thickness of the second layer 128, here equal to about half the thickness of the second layer 128, that is, equal to about 0.75 mm. The first housing 108 in which the first photonic circuit 104 is intended to be inserted is also etched through the upper face 138 in a portion of the thickness of the second layer 128, here equal to about half the thickness of the the second layer 128, that is to say equal to about 0.75 mm. The dimensions of the first housing 108 are adapted to those of the first photonic circuit 104 which is intended to be optically coupled to the cell 106. Fixing holes (not visible in FIGS. 4A and 4B) are also produced through the second layer 128. The number, dimensions and positioning of these holes correspond to those formed through the first layer 126. A second housing 140 is also etched through the upper face 138 in a portion of the thickness of the second layer 128, here equal to about half the thickness of the second layer 128, i.e., about 0.75 mm. This second housing 140 here has dimensions similar to those of the first housing 108. This second housing 140 is intended to receive a second photonic circuit 146 which will be optically coupled to an outlet face 111 of the first chamber 110 (opposite to the input face 109 for receiving the light beam from the first photonic circuit 104) and 5 will collect the output light signal having passed through the first chamber 110 so as to be able for example to check the alignment and the power of the emitted light beam This second housing 140 is, however, optional because the device 100 may not have this second photonic circuit 146. The two layers 126, 128 are then sealed together to form the cell 106, shown in FIG. The stack, or the assembly, obtained thus comprises, on the upper face 130 of the first layer 126, the locations 132, 134 destiny s acoustic detector 122, 124 and openings 118, 120 for the inlet and the outlet of the gas cell 106. The housing 108, 140 are accessible from the side faces of the cell 106.
    [0023] The dimensions of the elements of the cell 106 are for example: chambers 110, 112: length (dimension along the X axis) equal to about 20 mm, width (dimension along the Y axis) equal to about 1.5 mm and height (dimension along the Z axis) equal to about 1.5 mm; - capillaries 114, 116: length (dimension along the X axis) equal to 20 about 20 mm, width (dimension along the Y axis) equal to about 1.5 mm, and height (dimension along the Z axis) equal about 0.75 mm; - spacing between the capillaries 114, 116 (dimension parallel to the X axis) equal to about 10 mm; height (dimension along the Z axis) of the housings 108, 140 equal to approximately 0.75 mm. The total volume of the cell 106 is about 135 mm3. According to an alternative embodiment, the device 100 may comprise chambers 110, 112 that do not have similar dimensions. Indeed, since the device 100 is a miniaturized device, it can appear a 30-phase opposition between the pressure signals measured in the two chambers 110 and 112 which is imperfect when the dimensions of the chambers 110 and 112 are identical. . The subtraction of these two signals which is performed to obtain the desired measurement is then not optimal. In order to improve this phase opposition, it is possible that the widths and / or lengths of the chambers 110 and 112 are different from each other. An optimization by simulation (for example by solving the equation of the pressure field in the device 100, with chambers 110, 112 of different sizes), for example via a calculation by the finite element method, leads to the optimal ratio of the dimensions. This homogeneity of the pressure in the chambers 110, 112 also makes it possible to couple a greater number of acoustic detectors per chamber and thus to have a better signal-to-noise ratio. To reduce the pressure difference in the chambers 110, 112, it is also possible to change the spacing of the capillaries 114, 116 between them. It is thus advantageous for the capillaries 114, 116 to be spaced from each other by a distance equal to approximately half the length of the chambers 110, 112 (which corresponds, for the example previously described, to a spacing of 10 mm between the capillaries 114, 116 for chambers 110, 112 each of length equal to 20 mm). As a result, the inhomogeneity of pressure in the chambers 110, 112 decreases, and it is possible to increase the number of acoustic detectors coupled to the chambers 110, 112, thereby improving the signal-to-noise ratio of the device 100. The curve 10 visible in FIG. 6 represents the value of the resonance frequency obtained in the cell 106 as a function of the value of the spacing between the capillaries 114, 116, and the curve 12 represents the pressure homogeneity ( the percentage of difference between the minimum value and the maximum pressure value 25 in the chambers 110, 112) as a function of the value of the spacing between the capillaries 114, 116. These data are obtained for chambers 110, 112 of length equal to 20 mm, width equal to 1.5 mm and height equal to 1.5 mm, and for capillaries 114, 116 of length equal to 20 mm, width equal to 0.8 mm and height equal to approximately 1 mm. , 5 mm, and in the case where the capillaries 114, 116 open into chambers 110, 112 at levels corresponding to about 1/4 and 1/4 of their length. Curve 12 shows that the best homogeneity is obtained when the capillaries 114, 116 are spaced a distance equal to half the length of the chambers 110, 112, 10 mm in this case. The curve 14 visible in FIG. 7 represents the value of the amplitude of the acoustic signal obtained in the chambers 110, 112 of the cell 106, when the spacing between the capillaries 114, 116 is equal to half the length of the 110, 112, and varying the width (dimension along the X axis for the example shown in Figure 1) of the capillaries 114, 116 in order to find the optimum signal that can be delivered by the acoustic detectors 122, 124. This curve 10 shows that the maximum value of the signal obtained in the cell 106 is obtained when the width of the capillaries 114, 116 is equal to about 1.5 mm. In the example of Figure 1 described above, the openings 118, 120 open substantially at the middle of the length of the capillaries 114, 116. Alternatively, these openings 118, 120 may be formed at a different level than the medium. the length of the capillaries 114, 116, and this without disturbing the symmetry of the gas flow in the device 100 if the gas inlet and outlet are sufficiently narrow. To increase the intensity of the signal measured by the acoustic detectors 122, 124 of the device 100, it is possible to make the capillaries 114, 116 such that they are arranged at the ends of the chambers 110, 112. Such a configuration makes it possible to increase by approximately 5% the amplitude of the signal measured by the acoustic detectors. However, this increase in the amplitude of the signal is to the detriment of the pressure homogeneity which, it, decreases, while remaining good. The various embodiments described in EP 2515 096 A1, such as for example the use of a Peltier cooler, an amplifier integrated in the device, or the various examples of materials described, can be applied. to the modular photoacoustic detection device described herein. FIGS. 8A to 8C schematically represent the device 100 according to different configurations, having different possible couplings between the light source 102 and the first photonic circuit 104.
    [0024] In these three figures, the device 100 comprises a first Peltier cooling system 142 associated with the light source 102 for thermally managing the light source 102 independently of the other elements of the device 100. The device 100 also comprises, in the configurations 5 represented in FIGS. 8A and 8C, a second Peltier cooling system 144 associated with a frame (not visible in FIGS. 8A and 8C) on which the cell 106 is disposed and making it possible to thermally manage the cell 106 independently of the other elements of the device 100, in particular independently of the light source 102 and making the cell 106 work at a temperature different from that of the light source 102. In addition, in these three figures, the device 100 comprises a second photonic circuit 146, for example in silicon, optically coupled to the exit face 111 of the first chamber 11 0 (opposed to the input face 109 for receiving the light beam from the photonic circuit 104) and for collecting the output light signal having passed through the first chamber 110 in order to be able for example to check the alignment and the power the light beam emitted by the source 102. A portion of the second photonic circuit 146 is inserted into the second housing 140 formed in the cell 106 such that the output face 111 of the first chamber 110 is directly coupled to the second photonic circuit 146. Finally, the device 100 comprises an optical detector 148 intended to receive the signal coming from the second photonic circuit 146. In the first example represented in FIG. 8A, the light source 102 corresponds to a laser source emitting a single length wave, for example in the MIR, whose beam is sent in a collimation system 150 comprising at least one or two lenses and per putting out a light beam collimated on several centimeters. Indeed, a QCL laser emits a diverging laser beam at its output. The collimation system 150 makes it possible to collimate this beam and reduce its size. Upon arriving at the system 150, the beam is collimated with a first focal lens f correctly positioned. If the laser source 102 is punctual, it is sufficient to place the output of the laser source 102 at the focal length of this first lens, which makes it possible to have a parallel beam at the output of the first lens. If the source 102 is not punctual, it must be considered in this case of its shape. Let y1 be the radius of the laser beam and 01 the angle of divergence of the beam at the output of the source 102. The collimation of the light of this source 102 by a first lens of focal length f produces a beam of radius y2 = 01 * f and an angle of divergence 02 = y1 / f. Whatever the lens, the radius and divergence of the beam depend on each other. For example, to improve collimation by a factor of two (halving the angle), multiply the beam diameter by two.
    [0025] In order to reduce the size of the collimated beam, a group of two lenses is used in the system 150. If these two lenses are convergent with respective focal lengths f1 and f2, and it is desired to reduce the laser beam, the lenses are chosen. such as f2 <f1. The transverse magnification obtained is given by the formula G = f2 / f 1.
    [0026] It is also possible to position only one lens, in this case the laser placed at the focal length of the lens in order to have a beam at the output of the lens which is collimated. It is also possible to collimate and reduce the beam using two lenses as can be done with a telescope-type mount, i.e., an afocal system formed of two lenses where the The image focus of the first lens coincides with the object focus of the second lens, making it possible to create a beam reducer. To ensure good coupling between the first photonic circuit 104 and the assembly comprising the source 102 and the system 150, it is possible to place this assembly on a support that can control the translations and rotations of the assembly according to 3, 5 or 6 axes, thereby obtaining a good positioning of this assembly relative to the first photonic circuit 104 (which is placed in the first housing 108 and which, therefore, is correctly positioned linearly in front of the first chamber 110 of the cell 106).
    [0027] The collimation system 150 is interposed between the light source 102 and the input face 105 of the first photonic circuit 104 which corresponds, in this first example, to a waveguide adapted to the wavelength of the emitted beam. by the source 102 and which guides the beam in the first chamber 110. At the outlet 5 of the first chamber 110, the light beam is always collimated and leaves the first chamber 110 by the second photonic circuit 146 forming a guide. wave or a transparent window vis-à-vis the wavelength of the beam. In this first example, the light source 102 is not in direct contact with, or adhered to, the first photonic circuit 104 removably mounted thereto in the first housing 108 of the cell 106. The first cooling system 142 is disposed in the light source 102. In the second example shown in Figure 8B, the light source 102 corresponds to a bar of several laser sources or a single laser source. The source 102 is here in direct contact with the first photonic circuit 104 which corresponds to an AWG ("Arrayed Waveguide Grating") multiplexer / demultiplexer circuit, or a waveguide grating multiplexer / demultiplexer, for example realized in Ge or SiGe. The optical coupling between the source 102 and the first photonic circuit 104 is for example obtained via a direct coupling by the edge of the first photonic circuit 104. The source 102 is here secured to the first photonic circuit 104. The length of the first photonic circuit 104 is greater than that of the first housing 108 so that only a portion of the first photonic circuit 104 is inserted into the first housing 108 and the light source 102 is located outside the cell 106 (this is also the case in the other examples described). An example of positioning the source 102 on the first photonic circuit 104 is described below. When the source 102 corresponds to a laser array, the outputs of the array are positioned opposite the inputs of the first photonic circuit 104 using a binocular loupe. The laser bar is placed on a support controlling the translations and rotations of the bar with 3, 5 or 6 axes in order to perform a preliminary positioning of the bar vis-à-vis the first photonic circuit 104. A camera viewing the MIR radiation at the output of the first photonic circuit 104 is then used to more carefully adjust the positioning of the laser bar by acting on the axes of the support. The optimal setting is obtained when the camera sees a consequent illumination at the output of the first photonic circuit 104.
    [0028] This second configuration makes it possible to give priority to controlling the temperature of the light source 102, especially when the source 102 corresponds to a strip of several lasers. Indeed, because the wavelength emitted by each laser varies with the operating temperature of these lasers, it is therefore necessary to control the temperature of the laser array. Since the source 102 is in contact with the first photonic circuit 104 and it is also in direct contact with the photoacoustic cell 106, it is not possible to independently control the source 102 with respect to If the cell 106 is working at a temperature different from that of the source 102, the control of the temperature of the cell 106 will influence the temperature of the source 102. Temperature management of the source 102 is therefore preferred by combining a cooling system only at source 102 to ensure the proper operation of the latter. In the third example shown in FIG. 8C, the optical coupling between the light source 102, here of the laser type, and the input face 105 of the first photonic circuit 104 is formed by an optical fiber 152. The use of such an optical fiber 152 allows easy control of the light beam, especially with regard to its direction. This third example is advantageous for example when the light source 102 is distant and / or non-aligned with the photoacoustic cell 106. When the source 102 corresponds to a single laser, the laser output can be connected to the optical fiber 152. This fiber 152 is placed in front of the laser using a support whose purpose is to ensure optimal coupling between the laser and the fiber 152. This support may correspond to a small plate which is then attached to the laser when the setting is optimal. Once this first coupling has been performed, a similar coupling is effected between the other side of the fiber 152 and the input of the first AWG-type photonic circuit 104 corresponding to the wavelength of the beam emitted by the laser 102. The support may also be used to align the first photonic circuit 104 with the fiber 152. Once these adjustments have been made, the first photonic circuit 104 is disposed in the first housing 108 in front of the first chamber 110. The light thus enters the cell 106 with some divergence. This does not prevent the interaction between the laser and the gas molecules to be detected. It is possible to use "tapers", or progressive connections, at the input of the first photonic circuit 104 in order to facilitate the coupling between the fiber 152 and the laser. In the case of guided optics, such a tap allows to connect two guides of the same thickness but of different section for example by a prism trapezoidal base.
    [0029] The first photonic circuit 104 may comprise an end (at the input face 105) in the shape of a point, that is to say of a width smaller than that of the remainder of the photonic circuit 104. Such a shaped end peak allows to make less divergent the light beam obtained in particular at the output of the optical fiber 152, and is advantageous when it is not necessary to collimate the light beam at the input of the first photonic circuit 104. In the first example of embodiment of the photoacoustic cell 106 previously described in connection with Figures 2A to 5, the cell 106 is made from two metal layers 126, 128 in which are engraved the elements of the cell 106. The locations 132, 134, housing 108, 140, the chambers 110, 112 and the capillaries 114, 116 are etched in part of the thickness of the metal layers 126, 128. Alternatively, it is possible to implement steps of etching through the entire thickness of the layers of material used to form the cell 106. This involves using more than two layers of material to make the cell 106. Such a second embodiment of the cell 106 is described below with reference to FIGS. 9 to 12. In this second exemplary embodiment, the photoacoustic cell 106 is made by an assembly of four layers of material, here four metal layers referenced 154, 156, 158 and 160, in which the different elements of the cell 106 are formed by laser etching. All the etchings made in each of these layers 154 to 160 pass through the entire thickness of this layer. As a variant of the laser etching, it is possible for a chemical etching to be carried out throughout the thickness of these layers. The first layer 154 is shown in FIG. 9. This first layer 154 is intended to form the upper cover of the cell 106 and ensures the closing of the upper faces of the capillaries 114, 116. Nine fixing holes 162 are etched through any the thickness of the first layer 154, this thickness being for example equal to about 0.5 mm. The second layer 156 is shown in FIG. 10. This second layer 156 is traversed by two elongated openings forming the capillaries 114, 116. It is also traversed by the fixing holes 162. When the first layer 154 is disposed on the second layer 156, the capillaries 114, 116 are thus closed, at the level of the face of the second layer 156 which is in contact with the first layer 154, by the first layer 154. The thickness of the second layer 156 is, for example equal to about 0.5 mm. The third layer 158 is shown in FIG. 11. This third layer 158 is traversed by two elongated openings forming the chambers 110, 112. It is also traversed by another opening intended to form the first housing 108 in which the first photonic circuit 104 will be inserted (in this example, the cell 106 does not include the second housing 140). Two other holes are formed through the third layer 158 to form the openings 118, 120 for the supply and the evacuation of the gas in the cell 106. Finally, the fixing holes 162 are also made through this third layer 158. The thickness of this third layer 158 is of the order of the thickness of the first photonic circuit 104, advantageously about 0.72 mm, that is to say the typical thickness of a silicon substrate. . The third layer 158 is disposed against the face of the second layer 156 opposite to that disposed against the first layer 154, that is to say such that the second layer 156 is disposed between the first layer 154 and the third layer 158. By thereby positioning the third layer 158 against the second layer 156, the gas inlet and outlet openings 118, 120 are positioned just above the capillaries 114, 116. This third layer 158 also makes it possible to close the openings. capillaries 114, 116 at the face of the second layer 156 which is in contact with the third layer 158. In addition, the chambers 110, 112 and the first housing 108 are closed at the face of the third layer 158 which is in contact with the second layer 156, by the second layer 156. Finally, when the third layer 158 is thus disposed against the second layer 156, each of the capillaries 114, 116 communicates with the chambers 110, 112. The fourth layer 160 is shown in FIG. 12. This layer 160 is traversed by the openings 118, 120, through the fixing holes 162, as well as by two other openings intended to form the locations 132, 134 for the acoustic detectors 122, 124. This fourth layer 160 closes the chambers 110, 112 and the first housing 108 at the face of the third layer 158 which is in contact with this fourth layer 160. The thickness of the fourth layer 160 is for example equal to about 0.5 mm.
    [0030] For the production of the photoacoustic cell 106, the four layers 154, 156, 158 and 160 are assembled against one another as described above, and then fixed for example by four screws arranged in the fixing holes 162 located at the corners of the stack of layers. A central screw may be disposed in the fixing hole 162 located in the center of the cell 106, for securing the cell 106 to a frame. An additional mechanical part comprising gas inlet and outlet channels allowing the arrival and the exit of the gas to be analyzed in the cell 106, is for example disposed on the cell 106. O-rings are arranged between the fourth layer 160 of the cell 106 and this additional piece. The assembly is then tightened by four other screws to the frame via the four remaining fixing holes 162, which ensures all the more a maintenance of the cell 106 to the frame. In this second exemplary embodiment of the photoacoustic cell 106, the dimensions of the chambers 110, 112 are for example equal to approximately 20 mm (length) * 0.75 mm (width) * 0.72 mm (height), and the dimensions capillaries 114, 116 are for example equal to about 20 mm (length) * 0.5 mm (width) * 0.5 mm (height). The openings 118, 120, for example, each have a diameter of about 0.3 mm. Finally, the dimensions of the housing 108 are for example equal to about 6 mm (width) * 7.5 mm (length) * 0.72 mm (height). According to a third exemplary embodiment of the photoacoustic cell 106, this can be achieved by 3D printing using fused metal powders 5 from a CO2 laser, also called DMLS for "Direct Metal Laser Sintering", or sintering of metal powders. FIG. 13 schematically represents a photoacoustic cell 106 produced by such a method. This method makes it possible to produce the cell 106 with optimal precision thanks to the production of layers of thickness equal to about 0.02 mm and with a very good resolution of the details as well as excellent mechanical properties. Such a technique can be implemented with different metals such as stainless steel, an alloy of chromium and cobalt, aluminum, titanium or super-alloys such as those sold under the trademark Incolnel®. The photoacoustic cell 106 obtained with this method corresponds to a monolithic piece. 15
    权利要求:
    Claims (17)
    [0001]
    REVENDICATIONS1. A modular photoacoustic detection device (100) comprising at least: - a photoacoustic cell (106) comprising at least two chambers (110, 112) connected by at least two capillaries (114, 116) and forming a Helmholtz type differential acoustic resonator; acoustic detectors (122, 124) coupled to the chambers (110, 112); a light source (102) capable of emitting a light beam having at least one wavelength capable of exciting a gas intended to be detected and adjustable at a resonant frequency of the photoacoustic cell (106); a first photonic circuit (104) optically coupling the light source (102) to an input face (109) of a first one of the chambers (110); wherein the first photonic circuit (104) is removably disposed in a first housing (108) formed in the acoustic cell (106) and opening into the input face (109) of the first chamber (110).
    [0002]
    2. Device (100) according to claim 1, wherein the acoustic detectors (122, 124) are detachably coupled to the photoacoustic cell (106).
    [0003]
    3. Device (100) according to one of the preceding claims, wherein the photoacoustic cell (106) comprises at least one stack of a first and a second layers (126, 128) of material in which the chambers are formed. (110, 112), the capillaries (114, 116), the first housing (108), at least two openings (118, 120) each opening into one of the capillaries (114, 116) and at least two locations (132). , 134) each communicating with one of the chambers (110, 112) and wherein the acoustic detectors (122, 124) are disposed. 3037145 29
    [0004]
    4. Device (100) according to claim 3, wherein: - the locations (132, 134) are formed in a portion of the thickness of the first layer (126) and pass through an upper face (130) of the first layer (126);
    [0005]
    The openings (118, 120) pass through the entire thickness of the first layer (126); a first part of each of the chambers (110, 112) is formed in a part of the thickness of the first layer (126) and passes through a lower face (136) of the first layer (126) opposite to the upper face ( 130) of the first layer (126); the capillaries (114, 116) are formed in a portion of the thickness of the first layer (126) and pass through the lower face (136) of the first layer (126); a second portion of each of the chambers (110, 112) is formed in a portion of the thickness of the second layer (128) and passes through an upper face (138) of the second layer (128) which is disposed against the lower face (136) of the first layer (126), the first and second portions of each of the chambers (110, 112) being disposed facing each other; the first housing (108) is formed in a portion of the thickness of the second layer (128) and passes through the upper face (138) of the second layer (128). 5. Device (100) according to one of claims 1 or 2, wherein the photoacoustic cell (106) comprises at least one stack of a first, second, third and fourth layers (154, 156, 158, 160) of material in which are formed the chambers (110, 112), the capillaries (114, 116), the first housing (108), at least two openings (118, 120) each opening into one of the capillaries (114, 116). and at least two locations (132, 134) each communicating with one of the chambers (110, 112) and wherein the acoustic detectors (122, 124) are disposed. 3037145 30
    [0006]
    6. Device (100) according to claim 5, wherein: - the capillaries (114, 116) pass through the entire thickness of the second layer (156), the first and third layers (154, 158) between which is the second layer (156) forming upper and lower walls of the two capillaries (114, 116); the chambers (110, 112) and the first housing (108) pass through the entire thickness of the third layer (158), the second and fourth layers (156, 160) between which is the third layer (158) forming upper and lower walls of the chambers (110, 112) and the first housing (108); The locations (132, 134) pass through the entire thickness of the fourth layer (160); the openings (118, 120) pass through the entire thickness of the third and fourth layers (158, 160). 15
    [0007]
    7. Device (100) according to one of claims 1 or 2, wherein the photoacoustic cell (106) is formed of a monolithic piece of fused powders.
    [0008]
    The device (100) according to one of the preceding claims, wherein the light source (102) is optically coupled to an input face (105) of the first photonic circuit (104) by at least one collimation system ( 150) having at least one lens, and wherein the first photonic circuit (104) forms at least one waveguide. 25
    [0009]
    9. Device (100) according to one of claims 1 to 7, wherein the light source (102) is adapted to emit a light beam having several wavelengths and is arranged against the first photonic circuit (104) which forms a multiplexer - demultiplexer circuit with a waveguide network. 30
    [0010]
    10. Device (100) according to one of claims 1 to 7, wherein the light source (102) is optically coupled to an input face (105) of the first photon circuit (104) by at least one fiber optical (152), and wherein the first photonic circuit (104) forms at least one waveguide or a waveguide grating multiplexer - demultiplexer circuit. 5
    [0011]
    11. Device (100) according to one of the preceding claims, further comprising at least a first cooling system (142) adapted to thermally regulate the light source (102) and, when the light source (102) is not disposed against the first photonic circuit (104), a second cooling system (144) adapted to thermally regulate the photoacoustic cell (106) independently of the light source (102).
    [0012]
    12. Device (100) according to one of the preceding claims, wherein the photoacoustic cell (106) further comprises at least a second housing (140) opening on an outlet face (111) of the first chamber (110), and further comprising at least a second photonic circuit (146) optically coupling the output face (111) of the first chamber (110) to an optical detector (148) and releasably disposed in the second housing (140).
    [0013]
    13. Device (100) according to one of the preceding claims, wherein the photoacoustic cell (106) is formed of one or more metals.
    [0014]
    14. Device (100) according to one of the preceding claims, wherein a distance between the two capillaries (114, 116) is equal to about half the length of at least one of the chambers (110, 112). 25
    [0015]
    15. A gas detection device, comprising at least one device (100) according to one of the preceding claims and gas inlet and outlet channels communicating with the chambers (110, 112) of the photoacoustic detection device (100). ), and wherein said at least one wavelength of the light beam capable of being emitted by the light source (102) corresponds to at least one absorption wavelength of at least one gas intended to be detected . 3037145 32
    [0016]
    16. A method for producing a device (100) for modular photoacoustic detection, comprising at least the steps of: - producing at least one photoacoustic cell (106) comprising at least two chambers (110, 112) connected by at least two capillaries (114, 116) and forming a Helmholtz type differential acoustic resonator; coupling acoustic detectors (122, 124) to the chambers (110, 112); - Realization of at least one light source (102) capable of emitting a light beam having at least one wavelength capable of resonating the photoacoustic cell (106); - Realization of at least a first photonic circuit (104) removably disposed in a first housing (108) formed in the acoustic cell (106) and opening on an inlet face (109) of a first chamber ( 110), and optically coupling the light source (102) to the input face (109) of the first chamber (110).
    [0017]
    17. The method according to claim 16, wherein: the production of the photoacoustic cell comprises the production of at least one stack of first and second layers (126, 128) of material in which are formed, by chemical etching implemented in a portion of the thickness of each of the first and second layers (126, 128), the chambers (110, 112), the capillaries (114, 116), the first housing (108 ), at least two openings (118, 120) each opening into one of the capillaries (114, 116) and at least two locations (132, 134) each communicating with one of the chambers (110, 112) and which the acoustic detectors (122, 124) are arranged, or - the realization of the photoacoustic cell (106) comprises the production of at least one stack of a first, second, third and fourth layer (154, 156, 158, 160) of material in which are formed, by chemical etching or laser setting o in the entire thickness of each of the second, third and fourth layers (156, 158, 160), the chambers (110, 112), the capillaries 3037145 33 (114, 116), the first housing (108), the at least two openings (118, 120) each opening into one of the capillaries (114, 116) and at least two locations (132, 134) each communicating with one of the chambers (110, 112) and in which the acoustic detectors (122, 124) are arranged, or the photoacoustic cell (106) is formed of a monolithic piece of fused metal powders obtained by 3D printing.
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    同族专利:
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    EP3104162B1|2021-08-11|
    US10627339B2|2020-04-21|
    US20190212251A1|2019-07-11|
    EP3104162A1|2016-12-14|
    US20160356700A1|2016-12-08|
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    法律状态:
    2016-07-08| PLFP| Fee payment|Year of fee payment: 2 |
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    申请号 | 申请日 | 专利标题
    FR1555200|2015-06-08|
    FR1555200A|FR3037145B1|2015-06-08|2015-06-08|MODULAR PHOTOACOUSTIC DETECTION DEVICE|FR1555200A| FR3037145B1|2015-06-08|2015-06-08|MODULAR PHOTOACOUSTIC DETECTION DEVICE|
    US15/174,322| US10288553B2|2015-06-08|2016-06-06|Modular photoacoustic detection device|
    EP16173178.1A| EP3104162B1|2015-06-08|2016-06-06|Modular photoacoustic detection device|
    US16/357,915| US10627339B2|2015-06-08|2019-03-19|Modular photoacoustic detection device|
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